JEOL 840A SEM

The JEOL 840A SEM is used for low to medium magnification studies of a variety of specimens; from failure analysis to micro-compositional analysis. Samples of all shapes, sizes and types can be examined using the SEM and it the most heavily used microscope in the Facility.

Some facts about the SEM:

• Variable accelerating voltage; 200 to 40,000V
• Variable probe current; 1x10E-8 to 1x10E-12 Amps
• Maximum sample size of 6" in any one dimension
• Working distances; 8 to 48mm
• Sample rotation; 360º
• Sample tilting 90º
• Variable magnification; 10x to 300,000x
• Maximum resolution; 10 nm
• Secondary and Backscattered Electron detectors
• Equipped with EDS capable of detecting Carbon and forming X-ray maps of composition; composition to within 0.1 wt% (see future projects for system upgrades)
• Integrated digital imaging system
  • Noise reduction through frame averaging
  • Image capture and export in electronic form (TIFF..1 MB), storage on floppy (one image per) or removable Syquest disk (270 MB)
• Low cost (FREE), medium quality thermal printouts
• High quality, medium cost Polaroid type 55 film containing both negative and positive